Detection and characterization of defects in transparent barrier coatings

Abstract

A method has been developed to visualize defects in the coatings, which allows to analyze (and to map) the surface of samples up to hundreds of cm2 in size or more. The method, based on oxygen plasma etching, renders defects visible by optical microscopy. The method can also provide information about defect patterns on a macroscopic scale, thus facilitating diagnostics and improvement of fabrication procedures.