Study of CF4 capacitive plasma chemistry through mass spectrometry technique and global model

Abstract

In this work the chemistry of CF4 capacitive plasma is studied. For this, experimental measurements were made by mass spectrometry technique which allowed the analysis of neutral species generated during the fragmentation of the source gas by the electrical gas discharge. Additionally, we use global model simulations in order to complement the experimental results, allowing to discern the main chemical processes occurring in the CF4 plasma. The global model developed here considers the main chemical reactions in CF 4 plasma: momentum transfer, vibrational, ionization, dissociation, electron attachment and loss, recombination between charged and neutral species in the gas phase and the reactor walls. © 2013 IEEE.