Electron energy distribution function measurements in a low pressure expanding jet plasma

Abstract

In this paper, we report on the existence of two electron temperature populations in the low pressure expanding dc plasma jet through the investigation of the spatial evolution of EEDF measured by a single Langmuir probe system. It was observed that for argon the plasma jet is Maxwellian type in all discharge axes. However, when an electronegative gas was inserted/replaced the EEDF turns 'two-temperature' Maxwellian type or is deformed, increasing the high energy electron population. Finally, the effect of gas discharge power shows different behaviors when an electropositive gas was replaced by an electronegative gas. © 2013 IEEE.